Interference filter based absorber for thermopile detector array by surface micromachining

H Wu; A Emadi; G de Graaf; RF Wolffenbuttel

Interference filter based absorber for thermopile detector array by surface micromachining

H Wu, A Emadi, G de Graaf, RF Wolffenbuttel

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	21st Micromechanics and Micro systems Europe 2010
Editors	L Abelmann, H Groenland, J van Honschoten, H Verputten
Place of Publication	Enschede, The Netherlands
Publisher	MME
Pages	169-172
Number of pages	4
ISBN (Print)	978-90-816737-1-6
Publication status	Published - 2010
Event	MME 2010: Micromechanics and Microsystems Europe Workshop - Enschede, The Netherlands Duration: 26 Sept 2010 → 29 Sept 2010

Publication series

Name
Publisher	MME

Conference

Conference	MME 2010
Period	26/09/10 → 29/09/10

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{68e6b8003059464f8537a1a318c75d67,

title = "Interference filter based absorber for thermopile detector array by surface micromachining",

keywords = "Conf.proc. > 3 pag",

author = "H Wu and A Emadi and {de Graaf}, G and RF Wolffenbuttel",

year = "2010",

language = "English",

isbn = "978-90-816737-1-6",

publisher = "MME",

pages = "169--172",

editor = "L Abelmann and H Groenland and {van Honschoten}, J and H Verputten",

booktitle = "21st Micromechanics and Micro systems Europe 2010",

note = " MME 2010 : Micromechanics and Microsystems Europe Workshop ; Conference date: 26-09-2010 Through 29-09-2010",

}

Interference filter based absorber for thermopile detector array by surface micromachining. / Wu, H; Emadi, A; de Graaf, G et al.
21st Micromechanics and Micro systems Europe 2010. ed. / L Abelmann; H Groenland; J van Honschoten; H Verputten. Enschede, The Netherlands: MME, 2010. p. 169-172.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Interference filter based absorber for thermopile detector array by surface micromachining

AU - Wu, H

AU - Emadi, A

AU - de Graaf, G

AU - Wolffenbuttel, RF

PY - 2010

Y1 - 2010

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-90-816737-1-6

SP - 169

EP - 172

BT - 21st Micromechanics and Micro systems Europe 2010

A2 - Abelmann, L

A2 - Groenland, H

A2 - van Honschoten, J

A2 - Verputten, H

PB - MME

CY - Enschede, The Netherlands

T2 - MME 2010

Y2 - 26 September 2010 through 29 September 2010

ER -