Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem

S Roy; N Kumar; SF Pereira; HP Urbach

doi:10.1088/2040-8978/15/7/075707

Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem

S Roy, N Kumar, SF Pereira, HP Urbach

ImPhys/Optics

Research output: Contribution to journal › Article › Scientific › peer-review

25 Citations (SciVal)

12 Downloads (Pure)

Original language	English
Pages (from-to)	1-9
Number of pages	9
Journal	Journal of Optics
Volume	15
Issue number	7
DOIs	https://doi.org/10.1088/2040-8978/15/7/075707
Publication status	Published - 2013

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

075707-1 t/m 075707-9

Keywords

CWTS 0.75 <= JFIS < 2.00

Access to Document

10.1088/2040-8978/15/7/075707

Roy_2013_J._Opt._15_075707Final published version, 718 KB

Cite this

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title = "Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem",

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