@inproceedings{1b07d89d2c4d4bb1ae50fcdfdafa0916,
title = "Interrogating and manipulating at the nanometre scale : from scientific instrumentation to industrial applications",
keywords = "Conf.proc. > 3 pag",
author = "U Staufer and T Akiyama and S. Gautsch and D Parrat and {de Rooij}, NF and R Imer",
note = "harvest; Transducers 2013 & Eurosensors XXVII, Barcelona, Spain ; Conference date: 16-06-2013 Through 20-06-2013",
year = "2013",
doi = "10.1109/Transducers.2013.6627062",
language = "English",
isbn = "978-1-4673-5981-8",
publisher = "IEEE Society",
pages = "1488--1492",
editor = "JR Morante and C Hierold",
booktitle = "Proceedings of the 17th International Conference on Solid-State Sensors, Actuators, and Microsystems and Eurosensors XXVII",
}