Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement

Roumen Nojdelova, D Voigt, Arthur van de Nes, S Nihtianov

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement'. Together they form a unique fingerprint.

Engineering

INIS