Original language | Undefined/Unknown |
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Title of host publication | Abstractbook EIPBN'99. |
Pages | 250-251 |
Number of pages | 2 |
Publication status | Published - 1999 |
Investigation of illumination non-uniformities from an electron gun for projection electron-beam lithography.
D Moonen, MD Nijkerk, P Kruit, WK Waskiewicz
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific