Investigation of illumination non-uniformities from an electron gun for projection electron-beam lithography.

D Moonen, MD Nijkerk, P Kruit, WK Waskiewicz

    Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

    Original languageUndefined/Unknown
    Title of host publicationAbstractbook EIPBN'99.
    Pages250-251
    Number of pages2
    Publication statusPublished - 1999

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