Investigation of relative humidity sensors based on porous silicon, porous polysilicon and porous silicon carbide

E Connolly, GMO O Halloran, PM Sarro, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Name
Publisher	Kluwer

Keywords

@inproceedings{c5ea0cdb835043acb82437722b0ada2a,

title = "Investigation of relative humidity sensors based on porous silicon, porous polysilicon and porous silicon carbide",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "E Connolly and {O Halloran}, GMO and PM Sarro and PJ French",

year = "2001",

language = "Undefined/Unknown",

isbn = "0-7923-7012-0",

publisher = "Kluwer",

pages = "83--88",

editor = "{M Elwenspoek}",

booktitle = "Proceedings",

}

TY - GEN

T1 - Investigation of relative humidity sensors based on porous silicon, porous polysilicon and porous silicon carbide

AU - Connolly, E

AU - O Halloran, GMO

AU - Sarro, PM

AU - French, PJ

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0-7923-7012-0

SP - 83

EP - 88

BT - Proceedings

A2 - M Elwenspoek, null

PB - Kluwer

CY - Dordrecht

ER -