Investigations of bonding at an aluminium (III) oxide membrane in Si using ELNES separation

M. Stöger-Pollach, P. Schattschneider, J. Schneider, S. Gall, H. W. Zandbergen

Research output: Chapter in Book/Conference proceedings/Edited volumeChapterScientific

Abstract

An A1203 membrane regulates layer growth in the aluminium induced layer exchange (ALILE) process that is used for seed layer growth on flat substrates for photovoltaic (PV) applications. Due to the use of the energy loss near edge structure (ELNES) separation method, we now are able to separate the signal of oxygen influenced and uninfluenced material in electron energy loss spectrometry (EELS). We show that the aluminium of the membrane can be found as aluminium (III) oxide and that the Si of the seed layer remains untouched by the oxygen.

Original languageEnglish
Title of host publicationMicroscopy of Semiconducting Materials 2003
EditorsA.G. Cullis, P.A. Midgley
PublisherCRC Press
Pages401-404
ISBN (Electronic)9781351083089
ISBN (Print)0750309792, 9781315895536
DOIs
Publication statusPublished - 2018

Publication series

NameCRC Revivals
PublisherTaylor & Francis Group

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