Ion beam induced intermixing of interface structures in W/Si multilayers

MJH Kessels, J Verhoeven, AE Yakshin, FD Tichelaar, F Bijkerk

    Research output: Contribution to journalArticleScientificpeer-review

    11 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)484-491
    Number of pages8
    JournalNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Issue number3-4
    Publication statusPublished - 2004


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