Ion beam induced intermixing of interface structures in W/Si multilayers

MJH Kessels, J Verhoeven, AE Yakshin, FD Tichelaar, F Bijkerk

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	484-491
Number of pages	8
Journal	Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	222
Issue number	3-4
Publication status	Published - 2004

Keywords

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title = "Ion beam induced intermixing of interface structures in W/Si multilayers",

keywords = "academic journal papers, ZX CWTS JFIS < 1.00",

author = "MJH Kessels and J Verhoeven and AE Yakshin and FD Tichelaar and F Bijkerk",

year = "2004",

language = "Undefined/Unknown",

volume = "222",

pages = "484--491",

journal = "Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

number = "3-4",

}

TY - JOUR

T1 - Ion beam induced intermixing of interface structures in W/Si multilayers

AU - Kessels, MJH

AU - Verhoeven, J

AU - Yakshin, AE

AU - Tichelaar, FD

AU - Bijkerk, F

PY - 2004

Y1 - 2004

KW - academic journal papers

KW - ZX CWTS JFIS < 1.00

M3 - Article

SN - 0168-583X

VL - 222

SP - 484

EP - 491

JO - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

IS - 3-4

ER -