@article{834a3f506e73479784bb7c3b00929a6d,
title = "Ion beam induced intermixing of interface structures in W/Si multilayers",
keywords = "academic journal papers, ZX CWTS JFIS < 1.00",
author = "MJH Kessels and J Verhoeven and AE Yakshin and FD Tichelaar and F Bijkerk",
year = "2004",
language = "Undefined/Unknown",
volume = "222",
pages = "484--491",
journal = "Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",
number = "3-4",
}