Ion Beams in SEM: An experiment towards a high brightness low energy spread electron impact gas ion source

DS Jun, VG Kutchoukov, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	29
Issue number	6
Publication status	Published - 2011

Keywords

@article{d9db137e555d42b19142f062f5d62bb1,

title = "Ion Beams in SEM: An experiment towards a high brightness low energy spread electron impact gas ion source",

keywords = "CWTS JFIS < 0.75",

author = "DS Jun and VG Kutchoukov and P Kruit",

year = "2011",

language = "Undefined/Unknown",

volume = "29",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - Ion Beams in SEM: An experiment towards a high brightness low energy spread electron impact gas ion source

AU - Jun, DS

AU - Kutchoukov, VG

AU - Kruit, P

PY - 2011

Y1 - 2011

KW - CWTS JFIS < 0.75

M3 - Article

SN - 1071-1023

VL - 29

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 6

ER -