Ion-implantation generated nanovoids in Si and MgO monitored by high resolution positron beam analysis

SWH Eijt, CV Falub, A van Veen, PE Mijnarends, MA van Huis, AV Fedorov

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    5 Citations (Scopus)
    Original languageUndefined/Unknown
    Title of host publicationProceedings MRS-Fall Meeting (Symposium O)
    PagesO14.11.1-O14.11.6
    Publication statusPublished - 2001

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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