Ion-implantation generated nanovoids in Si and MgO monitored by high resolution positron beam analysis

SWH Eijt, CV Falub, A van Veen, PE Mijnarends, MA van Huis, AV Fedorov

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

5 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	Proceedings MRS-Fall Meeting (Symposium O)
Pages	O14.11.1-O14.11.6
Publication status	Published - 2001

Keywords

@inproceedings{3969a96c10154de79ed355db7e811586,

title = "Ion-implantation generated nanovoids in Si and MgO monitored by high resolution positron beam analysis",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "SWH Eijt and CV Falub and {van Veen}, A and PE Mijnarends and {van Huis}, MA and AV Fedorov",

year = "2001",

language = "Undefined/Unknown",

pages = "O14.11.1--O14.11.6",

booktitle = "Proceedings MRS-Fall Meeting (Symposium O)",

}

TY - GEN

T1 - Ion-implantation generated nanovoids in Si and MgO monitored by high resolution positron beam analysis

AU - Eijt, SWH

AU - Falub, CV

AU - van Veen, A

AU - Mijnarends, PE

AU - van Huis, MA

AU - Fedorov, AV

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SP - O14.11.1-O14.11.6

BT - Proceedings MRS-Fall Meeting (Symposium O)

ER -