Ion-induced interface layer formation in W/Si and WRe/Si multilayers

MJH Kessels, J Verhoeven, FD Tichelaar, F Bijkerk

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{9a01b181fe83402292bc413c067bb2f9,

title = "Ion-induced interface layer formation in W/Si and WRe/Si multilayers",

keywords = "academic journal papers, ZX CWTS JFIS < 1.00",

author = "MJH Kessels and J Verhoeven and FD Tichelaar and F Bijkerk",

year = "2005",

language = "Undefined/Unknown",

volume = "582",

pages = "227--234",

journal = "Surface Science",

issn = "0039-6028",

publisher = "Elsevier",

number = "1-3",

}