Irreversible Kinetics in CVD: A Reinterpretation of titanium Nitride and Tungsten Formation

PJ van der Put, JAM Ammerlaan, JP Dekker, J Schoonman

    Research output: Contribution to journalArticleScientificpeer-review

    5 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)211-218
    Number of pages8
    JournalAdvanced Materials
    Volume5
    Publication statusPublished - 1999

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