Issues with transferring PureB CVD from an epitaxial reactor to a furnace system

KRC Mok, LK Nanver, WD de Boer, AHG Vlooswijk

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationICT.OPEN: Micro technology and micro devices (SAFE 2011)
EditorsA Smeulders, R van der Drift, F Karelse, D Stroobandt
Place of PublicationVeldhoven
PublisherSTW
Pages76-78
Number of pages3
ISBN (Print)978-90-73461-99-4
Publication statusPublished - 2011
EventICT.OPEN 2011 - Veldhoven, The Netherlands
Duration: 14 Nov 201115 Nov 2011

Publication series

Name
PublisherSTW

Conference

ConferenceICT.OPEN 2011
Period14/11/1115/11/11

Keywords

  • Geen BTA classificatie

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