Issues with transferring PureB CVD from an epitaxial reactor to a furnace system

KRC Mok; LK Nanver; WD de Boer; AHG Vlooswijk

Issues with transferring PureB CVD from an epitaxial reactor to a furnace system

KRC Mok, LK Nanver, WD de Boer, AHG Vlooswijk

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	ICT.OPEN: Micro technology and micro devices (SAFE 2011)
Editors	A Smeulders, R van der Drift, F Karelse, D Stroobandt
Place of Publication	Veldhoven
Publisher	STW
Pages	76-78
Number of pages	3
ISBN (Print)	978-90-73461-99-4
Publication status	Published - 2011
Event	ICT.OPEN 2011 - Veldhoven, The Netherlands Duration: 14 Nov 2011 → 15 Nov 2011

Publication series

Name
Publisher	STW

Conference

Conference	ICT.OPEN 2011
Period	14/11/11 → 15/11/11

Keywords

Geen BTA classificatie

Cite this

@inproceedings{43b3622808a142c99e8212b3953f87f7,

title = "Issues with transferring PureB CVD from an epitaxial reactor to a furnace system",

keywords = "Geen BTA classificatie",

author = "KRC Mok and LK Nanver and {de Boer}, WD and AHG Vlooswijk",

year = "2011",

language = "English",

isbn = "978-90-73461-99-4",

publisher = "STW",

pages = "76--78",

editor = "A Smeulders and {van der Drift}, R and F Karelse and D Stroobandt",

booktitle = "ICT.OPEN: Micro technology and micro devices (SAFE 2011)",

note = "ICT.OPEN 2011 ; Conference date: 14-11-2011 Through 15-11-2011",

}

Issues with transferring PureB CVD from an epitaxial reactor to a furnace system. / Mok, KRC; Nanver, LK; de Boer, WD et al.
ICT.OPEN: Micro technology and micro devices (SAFE 2011). ed. / A Smeulders; R van der Drift; F Karelse; D Stroobandt. Veldhoven: STW, 2011. p. 76-78.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Issues with transferring PureB CVD from an epitaxial reactor to a furnace system

AU - Mok, KRC

AU - Nanver, LK

AU - de Boer, WD

AU - Vlooswijk, AHG

PY - 2011

Y1 - 2011

KW - Geen BTA classificatie

UR - http://resolver.tudelft.nl/uuid:a99550fe-6785-4db2-93d2-2b85ae1ab8ea

M3 - Conference contribution

SN - 978-90-73461-99-4

SP - 76

EP - 78

BT - ICT.OPEN: Micro technology and micro devices (SAFE 2011)

A2 - Smeulders, A

A2 - van der Drift, R

A2 - Karelse, F

A2 - Stroobandt, D

PB - STW

CY - Veldhoven

T2 - ICT.OPEN 2011

Y2 - 14 November 2011 through 15 November 2011

ER -

Issues with transferring PureB CVD from an epitaxial reactor to a furnace system

Publication series

Conference

Keywords

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Cite this