Iterative learning control: with applications to a wafer stage

BG Dijkstra

Research output: ThesisDissertation (TU Delft)

20 Citations (Scopus)
Original languageUndefined/Unknown
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • Bosgra, Okko, Supervisor
Award date8 Sep 2004
Place of PublicationS.l.
Publisher
Print ISBNs90-370-0209-0
Publication statusPublished - 2004

Keywords

  • Diss. prom. aan TU Delft

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