iTIRM as a tool for qualifying polishing processes

OW Faehnle, T Wons, E Koch, S Debruyne, M Meeder, SM Booij, JJM Braat

Research output: Contribution to journalArticleScientificpeer-review

28 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)4036-4038
Number of pages3
JournalApplied Optics
Volume41
Issue number19
Publication statusPublished - 2002

Keywords

  • ZX CWTS JFIS < 1.00

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