iTIRM as a tool for qualifying polishing processes

OW Faehnle, T Wons, E Koch, S Debruyne, M Meeder, SM Booij, JJM Braat

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{1b266acd173447debde93369ff2108c5,

title = "iTIRM as a tool for qualifying polishing processes",

keywords = "ZX CWTS JFIS < 1.00",

author = "OW Faehnle and T Wons and E Koch and S Debruyne and M Meeder and SM Booij and JJM Braat",

year = "2002",

language = "Undefined/Unknown",

volume = "41",

pages = "4036--4038",

journal = "Applied Optics",

issn = "1559-128X",

publisher = "The Optical Society",

number = "19",

}