iTIRM as a tool for qualifying polishing processes

OW Faehnle, T Wons, E Koch, S Debruyne, M Meeder, SM Booij, JJM Braat

Research output: Contribution to journalArticleScientificpeer-review

27 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)4036-4038
Number of pages3
JournalApplied Optics
Volume41
Issue number19
Publication statusPublished - 2002

Keywords

  • ZX CWTS JFIS < 1.00

Cite this

Faehnle, OW., Wons, T., Koch, E., Debruyne, S., Meeder, M., Booij, SM., & Braat, JJM. (2002). iTIRM as a tool for qualifying polishing processes. Applied Optics, 41(19), 4036-4038.