Kinetcs of copper forcefill.

GCAM Janssen, JF Jongste, S Radelaar

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings Advanced Metallization Materials Research Society.
Editors	Gurtej S Sandhu, H Koerner, M Murakami, Y Yasuda, N Kobayashi
Pages	159-163
Number of pages	5
Publication status	Published - 1999

Name

Name
Volume	1

Cite this

@inproceedings{fd238ccbc669405dbd38ef8281b85057,

title = "Kinetcs of copper forcefill.",

author = "GCAM Janssen and JF Jongste and S Radelaar",

year = "1999",

language = "Undefined/Unknown",

pages = "159--163",

editor = "Sandhu, {Gurtej S} and H Koerner and M Murakami and Y Yasuda and N Kobayashi",

booktitle = "Proceedings Advanced Metallization Materials Research Society.",

}