Kinetics of copper chemical vapour deposition from Cu(hfac)VTMS

MLH ter Heerdt, PJ van der Put, EM Kelder, J Schoonman

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    1 Citation (Scopus)
    Original languageUndefined/Unknown
    Title of host publicationFundamental Gas-Phase and Surface Chemistry of Vapor-Phase Materials Synthesis
    EditorsTJ Mountziaris, MD Allendorf, KF Jensen, RK Ulrich, MR Zachariah, M Meyyappan
    Place of PublicationPennington (NJ) USA
    PublisherThe Electrochemical Society, Inc.
    Number of pages6
    Publication statusPublished - 1999
    EventBoston (MZ) USA - Pennington (NJ) USA
    Duration: 1 Nov 19996 Nov 1999

    Publication series

    PublisherThe Electrochemical Society Inc.


    ConferenceBoston (MZ) USA

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