Kinetics of Copper Forcefill.

GCAM Janssen; JF Jongste; S Radelaar; ThW de Loos; T Kouno; T Ohba

Kinetics of Copper Forcefill.

GCAM Janssen, JF Jongste, S Radelaar, ThW de Loos, T Kouno, T Ohba

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of "Advanced Metalization and Interconnect Systems for ULSI Applications 1998", Colorado Springs
Editors	GS Sandhu, H Koerner, M Murakami, Y Yasuda, N Kobayashi
Place of Publication	Warrendale PA
Publisher	Materials Research Society
Pages	159-163
Number of pages	5
Publication status	Published - 1998

Publication series

Name
Publisher	Materials Research Society

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this

@inproceedings{daa13dc8946947b8b3dd93dec7f60d7b,

title = "Kinetics of Copper Forcefill.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "GCAM Janssen and JF Jongste and S Radelaar and {de Loos}, ThW and T Kouno and T Ohba",

year = "1998",

language = "Undefined/Unknown",

publisher = "Materials Research Society",

pages = "159--163",

editor = "GS Sandhu and H Koerner and M Murakami and Y Yasuda and N Kobayashi",

booktitle = "Proceedings of {"}Advanced Metalization and Interconnect Systems for ULSI Applications 1998{"}, Colorado Springs",

address = "United States",

}

Kinetics of Copper Forcefill. / Janssen, GCAM; Jongste, JF; Radelaar, S et al.
Proceedings of "Advanced Metalization and Interconnect Systems for ULSI Applications 1998", Colorado Springs. ed. / GS Sandhu; H Koerner; M Murakami; Y Yasuda; N Kobayashi. Warrendale PA: Materials Research Society, 1998. p. 159-163.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - Kinetics of Copper Forcefill.

AU - Janssen, GCAM

AU - Jongste, JF

AU - Radelaar, S

AU - de Loos, ThW

AU - Kouno, T

AU - Ohba, T

PY - 1998

Y1 - 1998

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SP - 159

EP - 163

BT - Proceedings of "Advanced Metalization and Interconnect Systems for ULSI Applications 1998", Colorado Springs

A2 - Sandhu, GS

A2 - Koerner, H

A2 - Murakami, M

A2 - Yasuda, Y

A2 - Kobayashi, N

PB - Materials Research Society

CY - Warrendale PA

ER -