Kinetics of Cu segregation in AlCu (1%) submicron interconnects studied by resistance measurements

AJ Kalkman, GCAM Janssen, AH Verbruggen, S Radelaar

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	MRS 1997 spring meeting VII
Editors	RRKJJ Clement, KS Kirsch, JE Sanchez
Pages	267-272
Number of pages	6
Publication status	Published - 1997

Cite this

@inproceedings{e2e41148ebff4ff09915e906d449bf10,

title = "Kinetics of Cu segregation in AlCu (1%) submicron interconnects studied by resistance measurements",

author = "AJ Kalkman and GCAM Janssen and AH Verbruggen and S Radelaar",

year = "1997",

language = "Undefined/Unknown",

pages = "267--272",

editor = "RRKJJ Clement and KS Kirsch and JE Sanchez",

booktitle = "MRS 1997 spring meeting VII",

}