Kinetics of reduction of a RuO2(110) film on Ru(0001) by atomic hydrogen

D Ugur, A Storm, R Verberk, JC Brouwer, WG Sloof

    Research output: Contribution to journalArticleScientificpeer-review

    8 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)60-65
    Number of pages6
    JournalMicroelectronic Engineering
    Volume110
    DOIs
    Publication statusPublished - 2013

    Keywords

    • CWTS JFIS < 0.75

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