@inproceedings{167984a603f74474a4029705b4cbcaff,
title = "Kintecs of Copper Chemical Vapor Deposition From Cu(hfac)VTMS",
author = "{ter Heerdt}, MLH and {van der Put}, PJ and J Schoonman",
year = "1999",
language = "Undefined/Unknown",
publisher = "Materials Research Society",
pages = "149--154",
editor = "RN Johnson and WY Lee and MA Pickering and BW Sheldon",
booktitle = "Properties and Processing of Vapor-Deposited Coatings",
address = "United States",
note = "Boston (MA) USA ; Conference date: 30-11-1998 Through 02-12-1998",
}