@article{3f6b9a13f8ab4c739aa7ebcbb2af89be,
title = "Large Polycrystalline Silicon Grains Prepared by Excimer Laser Crystallization of Sputtered Amorphous Silicon Film with Process Temperature at 100C",
keywords = "Elektrotechniek, Techniek, academic journal papers, CWTS JFIS < 0.75",
author = "M He and R Ishihara and EJJ Neihof and {van Andel}, Y and H Schellevis and JW Metselaar and CIM Beenakker",
year = "2007",
language = "Undefined/Unknown",
volume = "46",
pages = "1245--1249",
journal = "Japanese Journal of Applied Physics. Part 2, Letters & Express Lettres",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "3B",
}