Laser CVD of silicon nanoclusters and in-situ process characterization

APLM Goossens, W Besling, J Schoonman

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationProceedings of the Twelfth European Conference on Chemical Vapour Deposition (EuroCVD-12)
    EditorsA Figueras
    PublisherEDP France
    Pages519-528
    Number of pages10
    Publication statusPublished - 1999

    Publication series

    Name
    PublisherEDP France
    NameThe European Physical Journal. Special Topics
    Volume9
    ISSN (Print)1155-4339

    Cite this

    Goossens, APLM., Besling, W., & Schoonman, J. (1999). Laser CVD of silicon nanoclusters and in-situ process characterization. In A. Figueras (Ed.), Proceedings of the Twelfth European Conference on Chemical Vapour Deposition (EuroCVD-12) (pp. 519-528). (The European Physical Journal. Special Topics; Vol. 9). EDP France.