Laser CVD of silicon nanoclusters and in-situ process characterization

APLM Goossens, W Besling, J Schoonman

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationProceedings of the Twelfth European Conference on Chemical Vapour Deposition (EuroCVD-12)
    EditorsA Figueras
    PublisherEDP France
    Number of pages10
    Publication statusPublished - 1999

    Publication series

    PublisherEDP France
    NameThe European Physical Journal. Special Topics
    ISSN (Print)1155-4339

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