Laser-induced chemical vapor deposition on nanostructured silicon carbonitride thin films.

W Besling, APLM Goossens, B Meester, J Schoonman

    Research output: Contribution to journalArticleScientificpeer-review

    110 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)544-553
    Number of pages10
    JournalJournal of Applied Physics
    Volume83
    Issue number1
    Publication statusPublished - 1998

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