Laser-induced chemical vapor deposition on nanostructured silicon carbonitride thin films.

W Besling, APLM Goossens, B Meester, J Schoonman

Research output: Contribution to journal › Article › Scientific › peer-review

Cite this

@article{9dbf260884ee4081bd5f20411cd01255,

title = "Laser-induced chemical vapor deposition on nanostructured silicon carbonitride thin films.",

author = "W Besling and APLM Goossens and B Meester and J Schoonman",

year = "1998",

language = "Undefined/Unknown",

volume = "83",

pages = "544--553",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "AIP Publishing",

number = "1",

}