Laser-induced chemical vapor deposition on nanostructured silicon carbonitride thin films.

W Besling, APLM Goossens, B Meester, J Schoonman

Research output: Contribution to journal › Article › Scientific › peer-review

Cite this

@article{9dbf260884ee4081bd5f20411cd01255,

title = "Laser-induced chemical vapor deposition on nanostructured silicon carbonitride thin films.",

author = "W Besling and APLM Goossens and B Meester and J Schoonman",

year = "1998",

language = "Undefined/Unknown",

volume = "83",

pages = "544--553",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "1",

}

TY - JOUR

T1 - Laser-induced chemical vapor deposition on nanostructured silicon carbonitride thin films.

AU - Besling, W

AU - Goossens, APLM

AU - Meester, B

AU - Schoonman, J

PY - 1998

Y1 - 1998

UR - https://www.scopus.com/pages/publications/0038554612

M3 - Article

SN - 0021-8979

VL - 83

SP - 544

EP - 553

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 1

ER -