Laser interferometer

K Joo (Inventor), JD Ellis (Inventor), JW Spronck (Inventor)

Research output: Patent

Original languageEnglish
Patent numberWO 2010/030179
IPCTU Delft
Priority date18/03/10
Publication statusPublished - 2011

Bibliographical note

TU Delft

Keywords

  • Octrooi

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