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Dive into the research topics of 'Laser micromachining of thin beams for silicon MEMS: Optimization of cutting parameters using the Taguchi method'. Together they form a unique fingerprint.- Sort by
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Tim P. Pusch, Mario D'Auria, Nima Tolou, Andrew S. Holmes*
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review