Lateral nano-Newton force-sensing piezoresistive cantilever for micro-particels handling

T Chu Duc, JF Creemer, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of the 16th MME Micromachining, Micromechanics and Microsystems Workshop 2005
Editors s.n.
Place of PublicationGöteborg, Sweden
PublisherMME
Pages268-271
Number of pages4
ISBN (Print)91-631-7553-3
Publication statusPublished - 2005
EventThe 16th Workshop on Micromachining, Micromechanics and Microsystems , Gotenborg, Sweden - Göteborg, Sweden
Duration: 4 Sep 20056 Sep 2005

Publication series

Name
PublisherMME

Conference

ConferenceThe 16th Workshop on Micromachining, Micromechanics and Microsystems , Gotenborg, Sweden
Period4/09/056/09/05

Bibliographical note

Editor onbekend JH

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

Cite this