@inproceedings{0f1e56356054429bb66939caffa728c1,
title = "Lateral nano-Newton force-sensing piezoresistive cantilever for micro-particels handling",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "{Chu Duc}, T and JF Creemer and PM Sarro",
note = "Editor onbekend JH; The 16th Workshop on Micromachining, Micromechanics and Microsystems , Gotenborg, Sweden ; Conference date: 04-09-2005 Through 06-09-2005",
year = "2005",
language = "Undefined/Unknown",
isbn = "91-631-7553-3",
publisher = "MME",
pages = "268--271",
editor = "s.n.",
booktitle = "Proceedings of the 16th MME Micromachining, Micromechanics and Microsystems Workshop 2005",
}