Lateral nanoNewton force sensing piezocantilevers for microparticle handling

JF Creemer, T Chu Duc, PM Sarro

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	102-106
Number of pages	5
Journal	Journal of Micromechanics and Microengineering
Volume	16
Issue number	6
Publication status	Published - 2006

Keywords

@article{a6205fbacb0f458b8ec568233519d7be,

title = "Lateral nanoNewton force sensing piezocantilevers for microparticle handling",

keywords = "Elektrotechniek, Techniek, academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "JF Creemer and {Chu Duc}, T and PM Sarro",

year = "2006",

language = "Undefined/Unknown",

volume = "16",

pages = "102--106",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

number = "6",

}

TY - JOUR

T1 - Lateral nanoNewton force sensing piezocantilevers for microparticle handling

AU - Creemer, JF

AU - Chu Duc, T

AU - Sarro, PM

PY - 2006

Y1 - 2006

KW - Elektrotechniek

KW - Techniek

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0960-1317

VL - 16

SP - 102

EP - 106

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 6

ER -