Lateral-transistor test structures for evaluating the effectiveness of surface doping techniques

L Qi, G Lorito, LK Nanver

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)581-588
Number of pages8
JournalIEEE Transactions on Semiconductor Manufacturing
Volume25
Issue number4
DOIs
Publication statusPublished - 2012

Keywords

  • academic journal papers
  • CWTS JFIS < 0.75

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