Layer-by-layer deposition of thin silicon films from hydrogen diluted silane

G van Elzakker, FD Tichelaar, M Zeman

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of the 9th STW Annual Workshop on Semiconductor Advances for Future Electronics and Sensors
Editors s.n.
Place of PublicationVeldhoven, The Netherlands
PublisherSTW
Pages465-469
Number of pages5
ISBN (Print)90-73461-44-8
Publication statusPublished - 2006
Event9th Annual Workshop on Semiconductor Advances for future Electronics and Sensors (SAFE 2006), Veldhoven, the Netherlands - Utrecht
Duration: 23 Nov 200624 Nov 2006

Publication series

Name
PublisherSTW

Conference

Conference9th Annual Workshop on Semiconductor Advances for future Electronics and Sensors (SAFE 2006), Veldhoven, the Netherlands
Period23/11/0624/11/06

Keywords

  • conference contrib. refereed
  • Vakpubl., Overig wet. > 3 pag

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