Lens array for electron beam lithography tool

V Katsap (Inventor), P Kruit (Inventor), D Moonen (Inventor), WK Waskiewicz (Inventor)

Research output: Patent

Original language	Undefined/Unknown
Patent number	US 7,345,290
IPC	aangevraagd door Agere Systems Inc, Allentown, PA, USA
Priority date	18/03/08
Publication status	Published - 2008

aangevraagd door Agere Systems Inc, Allentown, PA, USA

Keywords

@misc{6f7f1e236c5e4aa09a7cd2a6ae9ea5f1,

title = "Lens array for electron beam lithography tool",

keywords = "Octrooi",

author = "V Katsap and P Kruit and D Moonen and WK Waskiewicz",

note = "aangevraagd door Agere Systems Inc, Allentown, PA, USA; US 7,345,290; aangevraagd door Agere Systems Inc, Allentown, PA, USA",

year = "2008",

language = "Undefined/Unknown",

type = "Patent",

}