Lens array for electron beam lithography tool

V Katsap (Inventor), P Kruit (Inventor), D Moonen (Inventor), WK Waskiewicz (Inventor)

    Research output: Patent

    Original languageUndefined/Unknown
    Patent numberUS 7,345,290
    IPCaangevraagd door Agere Systems Inc, Allentown, PA, USA
    Priority date18/03/08
    Publication statusPublished - 2008

    Keywords

    • Octrooi

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