Linear and rotational thermal micro-stepper motors

A Khiat, JW Spronck, JP van Schieveen, S Milosavljevic, J Wei, P Estevez Castillo, PM Sarro, U Staufer

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)497-501
Number of pages5
JournalMicroelectronic Engineering
Volume98
DOIs
Publication statusPublished - 2012

Bibliographical note

Betreft special issue n.a.v de 37th International Conference on Micro and Nano Engineering, september 2011, Berlijn, Germany.

Keywords

  • academic journal papers
  • CWTS JFIS < 0.75

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