@article{ac88e428e9754754909c04e597cb9cff,
title = "Linear and rotational thermal micro-stepper motors",
keywords = "academic journal papers, CWTS JFIS < 0.75",
author = "A Khiat and JW Spronck and {van Schieveen}, JP and S Milosavljevic and J Wei and {Estevez Castillo}, P and PM Sarro and U Staufer",
note = "Betreft special issue n.a.v de 37th International Conference on Micro and Nano Engineering, september 2011, Berlijn, Germany.",
year = "2012",
doi = "10.1016/j.mee.2012.07.086",
language = "English",
volume = "98",
pages = "497--501",
journal = "Microelectronic Engineering",
issn = "0167-9317",
publisher = "Elsevier",
}