Lithographic apparatus and device manufacturing method

MP Dansberg (Inventor), SM Cornelissen (Inventor), HHM Cox (Inventor), RJP Diesen (Inventor), NR Kemper (Inventor), RH Munnig Schmidt (Inventor), HK Schoot (Inventor), R Jansens (Inventor)

Research output: Patent

Original languageUndefined/Unknown
Patent numberJP2005079585
IPCASML Netherlands
Priority date24/03/05
Publication statusPublished - 2005

Keywords

  • Octrooi

Cite this

Dansberg, MP., Cornelissen, SM., Cox, HHM., Diesen, RJP., Kemper, NR., Munnig Schmidt, RH., Schoot, HK., & Jansens, R. (2005). IPC No. ASML Netherlands. Lithographic apparatus and device manufacturing method. (Patent No. JP2005079585).