Lithographic apparatus and device manufacturing method using laser trimming of a multiple mirror contrast device

RH Munnig Schmidt (Inventor)

Research output: Patent

Original languageUndefined/Unknown
Patent numberUS2007133007
IPCASML Netherlands bv
Priority date14/06/07
Publication statusPublished - 2007

Bibliographical note

ASML Netherlands bv

Keywords

  • Octrooi

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