Lithographic apparatus and divice manufacturing method using laser trimming of a multiple mirrow contrast device

RH Munnig Schmidt (Inventor)

Research output: Patent

Original languageUndefined/Unknown
Patent numberUS 2007/0133007 A1
IPCASML NEO
Priority date14/02/07
Publication statusPublished - 2007

Bibliographical note

ASML NEO

Keywords

  • Octrooi

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