| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 17-22 |
| Number of pages | 6 |
| Journal | Delft Outlook |
| Volume | 2004.4 |
| Publication status | Published - 2004 |
Keywords
- Geen BTA classificatie
Lithographic mirrors measured with sub-nanometre accuracy
ML Krieg
Research output: Contribution to journal › Article › Professional