Research output per year
Research output per year
M Wieland (Inventor), J van Spijker (Inventor), R. Jager (Inventor), P Kruit (Inventor)
Research output: Patent
Original language | Undefined/Unknown |
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Patent number | US 6,958,804 |
IPC | verleend; Aanvrager: Mapper Lithography IP B.V., Delft, The Netherlands |
Priority date | 25/10/05 |
Publication status | Published - 2005 |
Research output: Patent