| Original language | Undefined/Unknown |
|---|---|
| Patent number | USRE45552 |
| IPC | Aanvrager: Mapper Lithography B.V. |
| Priority date | 9/06/15 |
| Publication status | Published - 2015 |
Lithography system and projection method
P Kruit (Inventor), R Jager (Inventor), S.W.H.K. Steenbrink (Inventor), MJJ Wieland (Inventor)
Research output: Patent