Lithography system and projection method

P Kruit (Inventor), MJJ Wieland (Inventor), S. Steenbrink (Inventor), R Jager (Inventor)

Research output: Patent

Original language	Undefined/Unknown
Patent number	US7842936 B2
IPC	Verleend. Aanvrager: Mapper Lithography
Priority date	30/11/10
Publication status	Published - 2010

Verleend. Aanvrager: Mapper Lithography

Keywords

@misc{2513750f41254dd4bd2fd967ed17f528,

title = "Lithography system and projection method",

keywords = "Octrooi, Verleend",

author = "P Kruit and MJJ Wieland and S. Steenbrink and R Jager",

note = "Verleend. Aanvrager: Mapper Lithography; US7842936 B2; Verleend. Aanvrager: Mapper Lithography",

year = "2010",

language = "Undefined/Unknown",

type = "Patent",

}