Lithography system comprising a converter plate and means for protecting the converter plate

M Wieland (Inventor), B Kampherbeek (Inventor), P Kruit (Inventor)

Research output: Patent

Original language	Undefined/Unknown
Patent number	US6,844,560
IPC	verleend; aanvrager: Mapper Lithography IP B.V.
Priority date	18/01/05
Publication status	Published - 2005

verleend; aanvrager: Mapper Lithography IP B.V.

Keywords

@misc{c35268c85bcb4187b8e65303f5f952ed,

title = "Lithography system comprising a converter plate and means for protecting the converter plate",

keywords = "Octrooi",

author = "M Wieland and B Kampherbeek and P Kruit",

note = "verleend; aanvrager: Mapper Lithography IP B.V.; US6,844,560; verleend; aanvrager: Mapper Lithography IP B.V.",

year = "2005",

language = "Undefined/Unknown",

type = "Patent",

}