Lithography system, method of clamping an wafer table

P Kruit (Inventor), G. de Boer (Inventor), MP Dansberg (Inventor)

Research output: Patent

Original languageEnglish
Patent numberCN 101884016 B
IPCApplicant: G de Boer, Mapper Lithography IP BV, MP Dansberg, P Kruit
Priority date9/10/13
Publication statusPublished - 2013

Cite this

Kruit, P., de Boer, G., & Dansberg, MP. (2013). IPC No. Applicant: G de Boer, Mapper Lithography IP BV, MP Dansberg, P Kruit. Lithography system, method of clamping an wafer table. (Patent No. CN 101884016 B).