Lithography system, method of clamping an wafer table

P Kruit; G. de Boer; MP Dansberg

Lithography system, method of clamping an wafer table

P Kruit (Inventor), G. de Boer (Inventor), MP Dansberg (Inventor)

Research output: Patent

Original language	English
Patent number	CN 101884016 B
IPC	Applicant: G de Boer, Mapper Lithography IP BV, MP Dansberg, P Kruit
Priority date	9/10/13
Publication status	Published - 2013

Bibliographical note

Applicant: G de Boer, Mapper Lithography IP BV, MP Dansberg, P Kruit

Cite this

@misc{1e881768d07f4fc2a3e001ceb520e741,

title = "Lithography system, method of clamping an wafer table",

author = "P Kruit and {de Boer}, G. and MP Dansberg",

note = "Applicant: G de Boer, Mapper Lithography IP BV, MP Dansberg, P Kruit; CN 101884016 B; Applicant: G de Boer, Mapper Lithography IP BV, MP Dansberg, P Kruit",

year = "2013",

language = "English",

type = "Patent",

}