Lithography system, method of clamping an wafer table

P Kruit (Inventor), G. de Boer (Inventor), MP Dansberg (Inventor)

    Research output: Patent

    Original languageEnglish
    Patent numberCN 101884016 B
    IPCApplicant: G de Boer, Mapper Lithography IP BV, MP Dansberg, P Kruit
    Priority date9/10/13
    Publication statusPublished - 2013

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