Original language | English |
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Patent number | US 8325321 B2 |
IPC | Applicant: Mapper Lithography IP BV |
Priority date | 4/12/12 |
Publication status | Published - 2012 |
Lithography system, method of heat dissipation and frame
P Kruit (Inventor), MP Dansberg (Inventor), MJJ Wieland (Inventor)
Research output: Patent