Lithography system, method of heat dissipation and frame

P Kruit (Inventor), MP Dansberg (Inventor), MJJ Wieland (Inventor)

    Research output: Patent

    Original languageEnglish
    Patent numberUS 8325321 B2
    IPCApplicant: Mapper Lithography IP BV
    Priority date4/12/12
    Publication statusPublished - 2012

    Bibliographical note

    Applicant: Mapper Lithography IP BV

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