Lithography system, sensor and measuring method

P Kruit (Inventor), E Slot (Inventor), TF Teepen (Inventor), MJJ Wieland (Inventor), SWHK Steenbrink (Inventor)

Research output: Patent

Original languageUndefined/Unknown
Patent numberUS7868300B2
IPCAanvrager: MAPPER Lithography B.V.
Priority date11/01/11
Publication statusPublished - 2011

Keywords

  • Octrooi

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