Load balancing in piezoelectric actuation

J. van Hulzen, G Schitter, J van Eijk, P van den Hof

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Abstract

High control performance i essential in manu precision positioning applications, such as control of the vertical sample position in a atomic-force microscope (AFM). This paper investigates the impact of load flexibility on piexoelectrically actuated positioning systems in terms of control performance. The modeling method used combines model analysis with simple transfer function manipulations, and shows, how the load dynamics may influence the ocntrol performance. The analysis is experimentally verified on a commercial AFM system.
Original languageUndefined/Unknown
Title of host publicationProceedings of the European Control Conference 2009, Budapest Hungary
Editors s.n.
Place of Publications.l.
PublisherEUCA
Pages5009-5014
Number of pages6
ISBN (Print)978-963-311-369-1
Publication statusPublished - 2009
EventEuropean Control Conference 2009, Budapest, Hungary - s.l.
Duration: 23 Aug 200926 Aug 2009

Publication series

Name
PublisherEUCA

Conference

ConferenceEuropean Control Conference 2009, Budapest, Hungary
Period23/08/0926/08/09

Keywords

  • Conf.proc. > 3 pag

Cite this