@inproceedings{e73d2a79dcf043ad8f1107c444283d62,
title = "Local digital etching and infiltration for tuning of a H1-cavity in deeply etched InP/InGaAsP/InP photonic crystals",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "HHJE Kicken and PFA Alkemade and {van der Heijden}, RW and F Karouta and R Notzel and {van der Drift}, EWJM and HWM Salemink",
year = "2009",
doi = "DOI: 101109/iciprm",
language = "Undefined/Unknown",
isbn = "978-1-4244-3432-9",
publisher = "IEEE Society",
pages = "31--34",
editor = "s.n.",
booktitle = "Local digital etching and infiltration for tuning of a H1-cavity in deeply etched InP/InGaAsP/InP photonic crystals",
note = "IEEE International Conference on Indium Phosphide & Related Materials, 2009 ; Conference date: 10-05-2009 Through 14-05-2009",
}