Local stress analysis in devices by FIB

R Kregting; S Gielen; W van Driel; PFA Alkemade; H Miro; JD Kamminga

Local stress analysis in devices by FIB

R Kregting, S Gielen, W van Driel, PFA Alkemade, H Miro, JD Kamminga

QN/Kavli Nanolab Delft

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

Original language	Undefined/Unknown
Title of host publication	11th Int.Conf.on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE2010
Editors	s.n.
Place of Publication	Bordeaux
Publisher	IEEE Society
Pages	1-5
Number of pages	5
ISBN (Print)	978-1-4244-7026-6
Publication status	Published - 2010
Event	EuroSimE 2010 : 11th International Conference on Thermal, Mechanical and Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems - Bordeaux, Frankrijk, Bordeaux, France Duration: 25 Apr 2010 → 28 Apr 2010 Conference number: 11

Publication series

Name
Publisher	IEEE

Conference

Conference	EuroSimE 2010
Country/Territory	France
City	Bordeaux
Period	25/04/10 → 28/04/10

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{f8c007ce1fd94049bc8d1adc35b9b58f,

title = "Local stress analysis in devices by FIB",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "R Kregting and S Gielen and {van Driel}, W and PFA Alkemade and H Miro and JD Kamminga",

year = "2010",

language = "Undefined/Unknown",

isbn = "978-1-4244-7026-6",

publisher = "IEEE Society",

pages = "1--5",

editor = "s.n.",

booktitle = "11th Int.Conf.on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE2010",

note = "null ; Conference date: 25-04-2010 Through 28-04-2010",

}

Local stress analysis in devices by FIB. / Kregting, R; Gielen, S; van Driel, W; Alkemade, PFA; Miro, H; Kamminga, JD.

11th Int.Conf.on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE2010. ed. / s.n. Bordeaux : IEEE Society, 2010. p. 1-5.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Local stress analysis in devices by FIB

AU - Kregting, R

AU - Gielen, S

AU - van Driel, W

AU - Alkemade, PFA

AU - Miro, H

AU - Kamminga, JD

N1 - Conference code: 11

PY - 2010

Y1 - 2010

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-1-4244-7026-6

SP - 1

EP - 5

BT - 11th Int.Conf.on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE2010

A2 - s.n., null

PB - IEEE Society

CY - Bordeaux

Y2 - 25 April 2010 through 28 April 2010

ER -