Local stress analysis in devices by FIB

R Kregting, S Gielen, W van Driel, PFA Alkemade, H Miro, JD Kamminga

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageUndefined/Unknown
Title of host publication11th Int.Conf.on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE2010
Editors s.n.
Place of PublicationBordeaux
PublisherIEEE Society
Pages1-5
Number of pages5
ISBN (Print)978-1-4244-7026-6
Publication statusPublished - 2010
EventEuroSimE 2010 : 11th International Conference on Thermal, Mechanical and Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems - Bordeaux, Frankrijk, Bordeaux, France
Duration: 25 Apr 201028 Apr 2010
Conference number: 11

Publication series

Name
PublisherIEEE

Conference

ConferenceEuroSimE 2010 
CountryFrance
CityBordeaux
Period25/04/1028/04/10

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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